| 000 | 00627pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2003 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a030647350X | ||
| 082 |
_a621.38152 _bOR5H |
||
| 100 | _aOrloff,Jon,Utlaut,Mark | ||
| 245 | 1 |
_aHIGH RESOLUTION FOCUSED ION BEAMS _cFIB AND ITS APPLICATIONS : THE PHYSICS OF LIQUID METAL ION SOURCES AND ION OPTICS AND THEIR APPLICATION TO FOCUSED ION BEAM TECHNOLOGY |
|
| 260 |
_a _bKluwer Academic / Plenum Publishers, New York _c2003 |
||
| 300 | _ax,303 | ||
| 650 | _aIon Bombardment -- Industrial Applications | ||
| 700 | _aSwanson,Lynwood | ||
| 964 | _gCIRC | ||
| 997 | _aA151745 C | ||
| 999 |
_c352703 _d352703 |
||