| 000 | 00530pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a047186109X | ||
| 082 |
_a621.381 _bG174M |
||
| 100 | _aGardner,Julian W.,Varadan,Vijay K. | ||
| 245 | 1 | _aMICROSENSORS, MEMS AND SMART DEVICES | |
| 260 |
_a _bJohn Wiley, Chichester _c2001 |
||
| 300 | _axvi,503 | ||
| 650 | _aMicroelectromechanical System Detectors | ||
| 650 | _aIntelligent Control Systems | ||
| 700 | _aAwadelkarim,Osama O. | ||
| 964 | _gCIRC | ||
| 997 | _aA136155 C | ||
| 999 |
_c352770 _d352770 |
||