| 000 | 00447pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0824758242 | ||
| 082 |
_a621 _bAL53M |
||
| 100 | _aAllen,James J | ||
| 245 | 1 | _aMICRO ELECTRO MECHANICAL SYSTEM DESIGN | |
| 260 |
_a _bTaylor & Francis, Boca Raton _c2005 |
||
| 300 | _axxv,465 | ||
| 650 | _aMicroelectromechanical Systems-Design And Construction | ||
| 964 | _gCIRC | ||
| 997 | _aA153517 C | ||
| 999 |
_c353524 _d353524 |
||