| 000 | 00436pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3540253777 | ||
| 082 |
_a620.5 _bM583M |
||
| 100 | _aMahalik,N. P. | ||
| 245 | 1 | _aMICROMANUFACTURING AND NANOTECHNOLOGY | |
| 260 |
_a _bSpringer-Verlag, Berlin _c2006 |
||
| 300 | _axxiii,468 | ||
| 650 | _aNanotechnology | ||
| 650 | _aMicromachining | ||
| 964 | _gCIRC | ||
| 997 | _aA155199 C | ||
| 999 |
_c354592 _d354592 |
||