| 000 | 00518pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1855739313 | ||
| 082 |
_a621.381531 _bN157 |
||
| 100 | _aBucknall,David G. | ||
| 245 | 1 | _aNANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS | |
| 260 |
_a _bWoodhead Publishing Ltd., Cambridge _c2005 |
||
| 300 | _axiv,409 | ||
| 650 | _aMolecular Electronics | ||
| 650 | _aMicrolithography | ||
| 650 | _aNanotechnology | ||
| 964 | _gCIRC | ||
| 997 | _aA153821 C | ||
| 999 |
_c354714 _d354714 |
||