| 000 | 00592pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0849339286 | ||
| 082 |
_a621.38152 _bB675X |
||
| 100 | _aBowen,D. Keith | ||
| 245 | 1 | _aX-RAY METROLOGY IN SEMICONDUCTOR MANUFACTURING | |
| 260 |
_a _bCrc Press, Boca Raton _c2006 |
||
| 300 | _a277 | ||
| 650 | _aSemiconductors -- Design And Construction -- Quality Control | ||
| 650 | _aIntegrated Circuits -- Measurement | ||
| 650 | _aSemiconductor Wafers -- Inspection | ||
| 700 | _aTanner,Brian K. | ||
| 964 | _gCIRC | ||
| 997 | _aA155172 s C | ||
| 999 |
_c355032 _d355032 |
||