000 | 00502pam a2200181a 44500 | ||
---|---|---|---|
008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
020 | _a0824723058 | ||
082 |
_a621 _bB226M |
||
100 | _aBanks,Danny | ||
245 | 1 |
_aMICROENGINEERING, MEMS, AND INTERFACING _cA PRACTICAL GUIDE |
|
260 |
_a _bCrc Press, Boca Raton _c2006 |
||
300 | _a326 | ||
440 |
_aMechanical Engineering _v |
||
650 | _aMicroelectromechanical Systems | ||
700 | _aFaulkner,L. L. | ||
964 | _gCIRC | ||
997 | _aA156128 C | ||
999 |
_c355340 _d355340 |