000 00502pam a2200181a 44500
008 160408b2006 xxu||||| |||| 00| 0 eng d
020 _a0824723058
082 _a621
_bB226M
100 _aBanks,Danny
245 1 _aMICROENGINEERING, MEMS, AND INTERFACING
_cA PRACTICAL GUIDE
260 _a
_bCrc Press, Boca Raton
_c2006
300 _a326
440 _aMechanical Engineering
_v
650 _aMicroelectromechanical Systems
700 _aFaulkner,L. L.
964 _gCIRC
997 _aA156128 C
999 _c355340
_d355340