000 | 00446pam a2200169a 44500 | ||
---|---|---|---|
008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
020 | _a3540236740 | ||
082 |
_a621.3815 _bN189I |
||
100 | _aNastasi,M. | ||
245 | 1 | _aION IMPLANTATION AND SYNTHESIS OF MATERIALS | |
260 |
_a _bSpringer-Verlag, Berlin _c2006 |
||
300 | _axiii,263 | ||
650 | _aIon Implantation | ||
700 | _aMayer,J. W. | ||
964 |
_cText _gTEXT |
||
997 | _aA157510 C | ||
999 |
_c355454 _d355454 |