000 00446pam a2200169a 44500
008 160408b2006 xxu||||| |||| 00| 0 eng d
020 _a3540236740
082 _a621.3815
_bN189I
100 _aNastasi,M.
245 1 _aION IMPLANTATION AND SYNTHESIS OF MATERIALS
260 _a
_bSpringer-Verlag, Berlin
_c2006
300 _axiii,263
650 _aIon Implantation
700 _aMayer,J. W.
964 _cText
_gTEXT
997 _aA157510 C
999 _c355454
_d355454