000 00595pam a2200193a 44500
008 160408b2008 xxu||||| |||| 00| 0 eng d
020 _a9781574446753
082 _a621.38152
_bH191S2
100 _aDoering,Robert
245 1 _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY
250 _a2nd
260 _a
_bCrc Press,Boca Raton
_c2008
500 _a"With Cd-Rpm"
650 _aSemiconductors -- Design And Construction -- Handbooks, Manuals, Etc
650 _aSemiconductor Industry -- Handbooks, Manuals, Etc
700 _aNish,Yoshio
964 _gCIRC
997 _aA159380 C
999 _c356085
_d356085