| 000 | 00595pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b2008 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781574446753 | ||
| 082 |
_a621.38152 _bH191S2 |
||
| 100 | _aDoering,Robert | ||
| 245 | 1 | _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY | |
| 250 | _a2nd | ||
| 260 |
_a _bCrc Press,Boca Raton _c2008 |
||
| 500 | _a"With Cd-Rpm" | ||
| 650 | _aSemiconductors -- Design And Construction -- Handbooks, Manuals, Etc | ||
| 650 | _aSemiconductor Industry -- Handbooks, Manuals, Etc | ||
| 700 | _aNish,Yoshio | ||
| 964 | _gCIRC | ||
| 997 | _aA159380 C | ||
| 999 |
_c356085 _d356085 |
||