000			00560pam a2200181a 44500
008			160408b1993 xxu||||| |||| 00| 0 eng d
020			_a0071127445
082			_a621.38152 _bM584P
100			_aMiddleman,Stanley
245	1		_aPROCESS ENGINEERING ANALYSIS IN SEMICONDUCTOR DEVICE FABRICATION
260			_a _bMcgraw-Hill, New York _c1993
300			_axvii,774
500			_aIncludes Bibliographical References And Index
650			_aSemiconductors - Design And Construction
700			_aHochberg,Arthur K.
964			_gCIRC
997			_aA124197 C
999			_c356864 _d356864