| 000 | 00592pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471784060 | ||
| 082 |
_a621.38152 _bM451F |
||
| 100 | _aMay,Gary S.,Spanos,Costas J. | ||
| 245 | 1 | _aFUNDAMENTALS OF SEMICONDUCTOR MANUFACTURING AND PROCESS CONTROL | |
| 260 |
_a _bWiley-Liss, Inc.,Hoboken, N. J. _c2006 |
||
| 300 | _axix,463 | ||
| 650 | _aSemiconductors-Design And Construction | ||
| 650 | _aIntegrated Circuits-Design And Construction | ||
| 650 | _aProcess Control-Statistical Methods | ||
| 964 | _gCIRC | ||
| 997 | _aA159782 C | ||
| 999 |
_c358320 _d358320 |
||