| 000 | 00754pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2008 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a978044452194 | ||
| 082 |
_a620.004 _bC738 |
||
| 100 | _a | ||
| 245 | 1 |
_aComprehensive microsystems _cedited by Yogesh B. Gianchandani, Osamu Tabata [and] Hans Zappe |
|
| 260 |
_aAmsterdam _bElsevier _c2008 |
||
| 300 | _a3V. | ||
| 500 | _aContents: V.1.Materials Fabrication And System Design - V.2.Actuation Mechanism Physical Sensing Chemical And Biological Systems- V.3.Optical Systems Industrial Applications Emerging Topics. | ||
| 650 | _aMicroelectronics2.Optical Detectors -- Industrial Applications3.Microelectromechanical | ||
| 700 | _aHans Zappe, Ed. | ||
| 997 | _aA160312 s C A160313 s C A160314 s C | ||
| 999 |
_c359935 _d359935 |
||