| 000 | 00579pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2009 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420045680 (hb.) | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.381 _bL74p |
||
| 100 | _aLiu, Ai-Qun | ||
| 245 |
_aPhotonic MEMS devices _bdesign, fabrication and control _cAi-Qun Liu |
||
| 260 |
_aBoca Raton _bCrc Press _c2009 |
||
| 300 | _a483p | ||
| 440 |
_aOptical Science And Engineering Series _vNo.136 |
||
| 650 | _aMicroelectromechanical systems | ||
| 700 | _aZhang, Xuming | ||
| 997 | _aA165019 s C | ||
| 999 |
_c362944 _d362944 |
||