000			00728pam a2200205a 44500
008			160408b2005 xxu||||| |||| 00| 0 eng d
020			_a9783527314935
040			_aIIT, Kanpur
082			_a620.14 _bM583
100			_a
245	0		_aMicroengineering of metals and ceramics _cedited by Detlef Lohe and Jurgen Haubelt
260			_aWeinheim _bWiley-Vch _c2005
300			_a2 v
440			_aAdvanced Micro And Nanosystems / Edited By Baltes _vV.4
504	0		_aIncludes bibliographical references and indexes
505			_aContents: pt.2.-Special replication techniques, automation, and properties
650			_aMicromechanics.
700			_aLohe, Detlef, Ed.
997			_aA168252 Pt.2 s C
999			_c366467 _d366467