| 000 | 00453pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b2010 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780819475602 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.381531 _bL63o |
||
| 100 | _aLin, Burn J. | ||
| 245 | 0 |
_aOptical lithography _bhere is why _cBurn J. Lin |
|
| 260 |
_aWashington _bSpie Press _c2010 |
||
| 300 | _axiv, 477p | ||
| 650 | _aMicrolithography | ||
| 997 | _aA169582 C | ||
| 999 |
_c367493 _d367493 |
||