000 00553pam a2200169a 44500
008 160408b2010 xxu||||| |||| 00| 0 eng d
020 _a9781849962537
040 _aIIT, Kanpur
082 _a620.50287
_bG159p
100 _aGao, Wei
245 1 _aPrecision Nanometrology
_bsensors and measuring systems for nanomanufacturing
_cWei Gao
260 _aLondon
_bSpringer
_c2010
300 _axiii, 354p
440 _aSpringer Series In Advanced Manufacturing
_v
650 _aNanostructured materials
997 _aA170046 s C
999 _c367670
_d367670