000 00588pam a2200181a 44500
008 160408b2010 xxu||||| |||| 00| 0 eng d
020 _a9783642105227
040 _aIIT, Kanpur
082 _a621.366
_bL333l
100 _a
245 0 _aLaser precision microfabrication
_cedited by Koji Sugioka, Michel Meunier and Alberto Pique
260 _aBerlin
_bSpringer-Verlag
_c2010
300 _axvi, 344p
440 _aSpringer Series In Materials Science
_vV. 135
650 _aManufacturing processes
700 _aSugioka, Koji, Ed.
997 _aA169960 C
999 _c367713
_d367713