| 000 | 00661pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780201444940 | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.395 _bJ175i2 |
||
| 100 | _aJaeger, Richard C. | ||
| 245 | 0 |
_aIntroduction to microelectronic fabrication _cRichard C. Jaeger |
|
| 250 | _a2nd | ||
| 260 |
_aNew Jersey _bPrentice Hall _c2001 |
||
| 300 | _axi, 316p | ||
| 440 |
_aModular Series On Solid State Devices / Edited By Gerold W. Neudeck _vV.5 |
||
| 650 | _aIntergrated circuits -- Very large scale integration -- Design and construction -- Textbook | ||
| 997 | _aA175162 C | ||
| 999 |
_c370944 _d370944 |
||