| 000 | 00650pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b1986 xxu||||| |||| 00| 0 eng d | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.38173 _bW831s2 |
||
| 100 | _aWolf, Stanley | ||
| 245 | 0 |
_aSilicon processing for VLSI ERA [v.1] _cStanley Wolf and Richard N. Taubner |
|
| 260 |
_aCalifornia _bLattice Press _c1986 |
||
| 300 | _axxxvi, 890p | ||
| 505 | _aContents: v.1. Process technology | ||
| 650 | _aSilicon | ||
| 650 | _aIntegrated circuits -- Very large scale integration | ||
| 650 | _aSemi conductors -- Etching | ||
| 700 | _aTaubner, Richard N. | ||
| 997 | _aA177279 v.1 C | ||
| 999 |
_c370951 _d370951 |
||