| 000 | 00593pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2000 xxu||||| |||| 00| 0 eng d | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.38173 _bW831s2 |
||
| 100 | _aWolf, Stanley | ||
| 245 | 0 |
_aSilicon processing for the VLSI ERA [v.2] _cStanley Wolf |
|
| 260 |
_aCalifornia _bLattice Press _c2000 |
||
| 300 | _axxxvi, 890p | ||
| 505 | _aContents:v.1. Process integration | ||
| 650 | _aSilicon | ||
| 650 | _aIntegrated circuits -- Very large scale information | ||
| 650 | _aSemiconductors -- Etching | ||
| 997 | _aA177277 v.2 C | ||
| 999 |
_c370960 _d370960 |
||