000 00747pam a2200193a 44500
008 160408b2010 xxu||||| |||| 00| 0 eng d
020 _a9789048138050
040 _aP K Kelkar Library, IIT Kanpur
082 _a621.381
_bAd95
100 _a
245 0 _aAdvanced materials and technologies for micro/nano-devices, sensors and actuators
_cedited by Evgeni Gusev, Eric Garfunkel and Arthur Dideikin
260 _aBerlin
_bSpringer
_c2010
300 _ax, 314p
440 _aNato Science For Peace And Security Series
_vB Physics And Biophysis
650 _aMicroelectro mechanical systems -- Design and Construction -- Congresses
650 _aNanotechnology -- Congresses
700 _aGusev, Evgeni, Ed.
997 _aA174214 s C
999 _c371019
_d371019