000 00618pam a2200193a 44500
008 160408b2013 xxu||||| |||| 00| 0 eng d
020 _a9781848213678
040 _aP K Kelkar Library, IIT Kanpur
082 _a621.381
_bT687
100 _a
245 0 _aTransmission electron microscopy in micro-nanoelectronics
_cedited by Alain Claverie
260 _aLondon
_bIste
_c2013
300 _axiii, 243p
440 _aNanoscience And Nanotechnology Series / Edited By Mireille Mouis
_v
650 _aMicroelectronics
650 _aNanotechnology
700 _aClaverie, Alain, Ed.
997 _aA177535 s C
999 _c373736
_d373736