000 00754pam a2200205a 44500
008 160408b2012 xxu||||| |||| 00| 0 eng d
020 _a9780199734214
040 _aP K Kelkar Library, IIT Kanpur
082 _a620.115
_bN157
100 _a
245 0 _aNanofabrication using focused ion and electron beams
_bprinciples and applications
_cedited by Ivo Utke, Stanislav Moshkalev and Phillip Russell
260 _aNew York
_bOxford University Press
_c2012
300 _axvi, 813p
440 _aOxford Series On Nanomanufacturing / Edited By Mark J. Jackson
_v
650 _aNanostructured materials
650 _aNanotechnology
650 _aElectron beams -- Industrial applications
700 _aUtke, Ivo, Ed.
997 _aA178845 C
999 _c374874
_d374874