000 | 00614pam a2200181a 44500 | ||
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008 | 160408b2009 xxu||||| |||| 00| 0 eng d | ||
020 | _a9780854044658 | ||
040 | _aP K Kelkar Library, IIT Kanpur | ||
082 |
_a671.735 _bC42 |
||
100 | _a | ||
245 | 0 |
_aChemical vapour deposition _bprecursors, processes and applications _cedited by Anthony C . Jones and Michael L. Hitchman |
|
260 |
_aCambridge _bRoyal Society Of Chemistry _c2009 |
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300 | _axv, 582p | ||
650 | _aChemical vapor deposition. | ||
700 | _aJones, Anthony C., Ed | ||
700 | _aMichael L. Hitchman, Ed. | ||
997 | _aA180562 C | ||
999 |
_c376209 _d376209 |