000 00614pam a2200181a 44500
008 160408b2009 xxu||||| |||| 00| 0 eng d
020 _a9780854044658
040 _aP K Kelkar Library, IIT Kanpur
082 _a671.735
_bC42
100 _a
245 0 _aChemical vapour deposition
_bprecursors, processes and applications
_cedited by Anthony C . Jones and Michael L. Hitchman
260 _aCambridge
_bRoyal Society Of Chemistry
_c2009
300 _axv, 582p
650 _aChemical vapor deposition.
700 _aJones, Anthony C., Ed
700 _aMichael L. Hitchman, Ed.
997 _aA180562 C
999 _c376209
_d376209