| 000 | 00630 a2200193 4500 | ||
|---|---|---|---|
| 082 |
_a621.38152 _bIn8 |
||
| 245 | 1 |
_aION IMPLANTATION IN SEMICONDUCTORS _cINTERNATIONAL CONFERENCE ON ION IMPLANTATION IN SEMICONDUCTORS, PHYSICS AND TECHNOLOGY, FUNDAMENTAL AND APPLIED ASPECTS (2nd : 1971 : GARMISCH-PARTENKIRCHEN, BAVARIA, GERMANY) |
|
| 260 |
_aBerlin _bSpringer-Verlag _c1971 |
||
| 300 | _a506,Y | ||
| 650 | _aSemiconductors -- Congresses | ||
| 650 | _aIon Bombardment -- Congresses | ||
| 700 | _aRuge, I. | ||
| 700 | _a | ||
| 700 | _aGraul, J. | ||
| 700 | _a | ||
| 906 | _h1971 | ||
| 964 | _gCIRC | ||
| 997 | _aA19489 s C | ||
| 999 |
_c459814 _d459814 |
||