| 000 | 00375 a2200133 4500 | ||
|---|---|---|---|
| 082 |
_a537.622 _bIn8 |
||
| 245 | 1 |
_aION IMPLANTATION IN SEMICONDUCTORS AND OTHER MATERIALS _cPROCEEDINGS |
|
| 260 |
_aNew York _bPlenum Press _c1973 |
||
| 300 | _a657 | ||
| 650 | _aIon Implantation -- Congresses | ||
| 650 | _aSemiconductors -- Congresses | ||
| 964 | _gCIRC | ||
| 997 | _aA32501 C | ||
| 999 |
_c461333 _d461333 |
||