| 000 | 00650 a2200217 4500 | ||
|---|---|---|---|
| 020 | _a1853123900 | ||
| 082 |
_a621.381 _bSI59A |
||
| 100 | _aR. A. Adey,A. Lahrmann,C. Lebmolann | ||
| 245 | 1 | _aSIMULATION AND DESIGN OF MICROSYSTEMS AND MICROSTRUCTURES | |
| 260 |
_a _bComputational Mechanics Pub., Southampton _c1995 |
||
| 300 | _a337 | ||
| 650 | _aMicroelectronics -- Design -- Congresses | ||
| 650 | _aMicroelectronics -- Simulation Methods -- Congresses | ||
| 650 | _aMicromechanics -- Congresses | ||
| 700 | _aAdey,R. A.,Lahrmann,A. | ||
| 700 | _a | ||
| 700 | _aLebmolann,C. | ||
| 700 | _a | ||
| 964 | _gCIRC | ||
| 997 | _aA142153 s C | ||
| 999 |
_c467862 _d467862 |
||