| 000 | 00405 aa a2200157 a 4500 | ||
|---|---|---|---|
| 020 | _a9780470016992 | ||
| 082 |
_a621.381 _bB146s |
||
| 100 | _aBaglio, S.(Et.Al.) | ||
| 245 | 1 | _aScaling issues and design of MEMS | |
| 260 |
_a _bJohn Wiley & Sons, Ltd., England; _c2007 |
||
| 300 | _axiii | ||
| 690 | _aMEMS | ||
| 690 | _adesign of MEMS | ||
| 690 | _aScaling and design of MEMS | ||
| 997 | _aA160816 C | ||
| 999 |
_c468893 _d468893 |
||