| 000 | 00612 a2200193 4500 | ||
|---|---|---|---|
| 082 |
_a621.38152028 _bIn8i4 |
||
| 100 |
_a _d |
||
| 245 | 1 |
_aION IMPLANTATION TECHNIQUES _cINTERNATIONAL CONFERENCE ON ION IMPLANTATION : EQUIPMENT AND TECHNIQUES (4th : 1982 : BERCHTESGADEN) |
|
| 260 |
_aBerlin _bSpringer-Verlag _c1982 |
||
| 300 | _axii,372,,,,, | ||
| 440 |
_aSpringer Series In Electrophysics _vV. 10 |
||
| 650 | _aIon Implantation -- Congresses | ||
| 650 | _aIon Implantation -- Technique | ||
| 700 | _aGLOISCHNING, H. | ||
| 700 | _aRYSSEL, H. | ||
| 906 | _h1982 | ||
| 964 | _gCIRC | ||
| 997 | _aA78788 s C | ||
| 999 |
_c470546 _d470546 |
||