| 000 | 00301pas a2200097 454500 | ||
|---|---|---|---|
| 008 | 160820b1992 xxu||||| |||| 00| 0 eng d | ||
| 022 | _a1057-7157 | ||
| 245 | _aIEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | ||
| 260 |
_aPISCATA WAY USA _bIEEE _c1992 |
||
| 906 |
_a17(1), 2008+ _b6/Yr _cPrint _dJan - Dec,2014 |
||
| 999 |
_c475163 _d475163 |
||