000			01373nam a2200217 4500
003			OSt
005			20250602185407.0
008			250528b |||||||| |||| 00| 0 eng d
020			_a9788131726044
040			_cIIT Kanpur
041			_aeng
082			_a621.395 _bP73s
100			_aPlummer, James D.
245			_aSilicon VLSI technology: fundamentals, practice and modeling _cJames D. Plummer, Michael D. Deal and Peter B. Griffin
260			_aNoida _bPearson _c2009
300			_axiv, 817p
520			_a Silicon VLSI Technology - Fundamentals, Practice And Modeling is a reference book that provides detailed information on the field of silicon technology, with a focus on the concept of modern computer simulation. It not only delves into the manufacturing of silicon chips, but also looks at the underlying scientific technologies involved in the process. It also provides the background on the invention of the silicon chip and its development over the years. The book presents several methods and examples of modern computer simulation. Some of the concepts covered in the book are CMOS technology, lithography, wafer fabrication, dopant diffusion, thin-film deposition, and etching. The book was published in 2009 by Pearson.
650			_aIntegrated circuits _aVery large scale integration
700			_aDeal, Michael D. _aGriffin. Peter B.
942			_cBK
999			_c567505 _d567505