Micro and Nano Fabrication [perpetual] (Record no. 563554)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01181 a2200253 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20210706131116.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 210204b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783662443958 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | IIT Kanpur |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 620.5 |
| Item number | G229m |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Gatzen, Hans H. |
| 245 ## - TITLE STATEMENT | |
| Title | Micro and Nano Fabrication [perpetual] |
| Remainder of title | tools and processes |
| Statement of responsibility, etc | Hans H. Gatzen, Volker Saile and Jurg Leuthold |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher | Springer |
| Year of publication | 2015 |
| Place of publication | New York |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxvi, 537p. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectromechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microfabrication |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Saile, Volker |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Leuthold, Jürg |
| 856 ## - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://link.springer.com/book/10.1007/978-3-662-44395-8 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | E books |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Source of acquisition | Cost, normal purchase price | Full call number | Accession Number | Cost, replacement price | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Electronic Resources | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 20/07/2021 | 88 | 41852.03 | 620.5 G229m | EBK10678 | 39859.08 | E books |