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Micro and Nano Fabrication [perpetual] : tools and processes

By: Contributor(s): Language: English Publication details: Springer 2015 New YorkDescription: xxvi, 537pISBN:
  • 9783662443958
Subject(s): DDC classification:
  • 620.5 G229m
Online resources: Summary: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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Holdings
Item type Current library Collection Call number Status Date due Barcode Item holds
E books E books PK Kelkar Library, IIT Kanpur Electronic Resources 620.5 G229m (Browse shelf(Opens below)) Available EBK10678
Total holds: 0

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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