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DRY ETCHING FOR MICROELECTRONICS

By: Material type: TextTextSeries: Materials Processing Theory And Practices ; V. 4Publication details: Amsterdam North-Holland 1984Description: xi,299Subject(s): DDC classification:
  • 621.3817 D847
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur COMPACT STORAGE (BASEMENT) 621.3817 D847 (Browse shelf(Opens below)) Link to resource Available A85124
Total holds: 0

Bibliography : P. 223-294

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