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MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY

By: Contributor(s): Material type: TextTextPublication details: Marcel Dekker, New York 1998Description: iv,327ISBN:
  • 0824799518
Subject(s): DDC classification:
  • 621.38152 N733M
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Holdings
Item type Current library Collection Call number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur General Stacks 621.38152 N733M (Browse shelf(Opens below)) Available A126689
Total holds: 0

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