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METAL IMPURITIES IN SILICON-DEVICE FABRICATION

By: Material type: TextTextPublication details: Springer-Verlag, Berlin 2000Edition: 2nd revDescription: xv,268ISBN:
  • 3540642137
Subject(s): DDC classification:
  • 621.38152 G758M2
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur COMPACT STORAGE (BASEMENT) 621.38152 G758M2 (Browse shelf(Opens below)) Link to resource Available A131369
Total holds: 0

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