PLASMA ETCHING
621.381531 / SU31P
Sugawara,M.
PLASMA ETCHING / FUNDAMENTALS AND APPLICATIONS .- Oxford Univ. Pr., Oxford, c1998 .- viii,347 . .- ( Series On Semiconductor Science And Technology
Includes Bibliographical References And Index
ISBN: 019856287X
Subject Headings:
Semiconductors -- Etching;
Plasma Etching;
Copy Details:
Acc. No.: A126191, Full Call No.: 621.381531 SU31P, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Sugawara,M.
PLASMA ETCHING / FUNDAMENTALS AND APPLICATIONS .- Oxford Univ. Pr., Oxford, c1998 .- viii,347 . .- ( Series On Semiconductor Science And Technology
Includes Bibliographical References And Index
ISBN: 019856287X
Subject Headings:
Semiconductors -- Etching;
Plasma Etching;
Copy Details:
Acc. No.: A126191, Full Call No.: 621.381531 SU31P, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------