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PLASMA ETCHING

By: Material type: TextTextSeries: Series On Semiconductor Science And Technology ; Publication details: Oxford Univ. Pr., Oxford c1998Description: viii,347ISBN:
  • 019856287X
Subject(s): DDC classification:
  • 621.381531 SU31P
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Holdings
Item type Current library Collection Call number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur General Stacks 621.381531 SU31P (Browse shelf(Opens below)) Available A126191
Total holds: 0

Includes Bibliographical References And Index

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