PLASMA ETCHING (Record no. 331459)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00587pam a2200193a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160408bc1998 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 019856287X |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 |
| Item number | SU31P |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Sugawara,M. |
| 245 1# - TITLE STATEMENT | |
| Title | PLASMA ETCHING |
| Statement of responsibility, etc. | FUNDAMENTALS AND APPLICATIONS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | |
| Name of publisher, distributor, etc. | Oxford Univ. Pr., Oxford |
| Date of publication, distribution, etc. | c1998 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | viii,347 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Series On Semiconductor Science And Technology |
| Volume/sequential designation | |
| 500 ## - GENERAL NOTE | |
| General note | Includes Bibliographical References And Index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors -- Etching |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma Etching |
| 964 ## - | |
| -- | CIRC |
| 997 ## - | |
| -- | A126191 C |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| General Stacks | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 12/08/2007 | 621.381531 SU31P | A126191 | 08/04/2016 | 08/04/2016 | Books |