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Micro and Nano Fabrication [perpetual] : tools and processes
Language: English Publication details: Springer 2015 New YorkDescription: xxvi, 537pISBN:- 9783662443958
- 620.5 G229m
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds | |
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E books
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PK Kelkar Library, IIT Kanpur | Electronic Resources | 620.5 G229m (Browse shelf(Opens below)) | Available | EBK10678 |
Total holds: 0
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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